عنوان مقاله [English]
نویسندگان [English]چکیده [English]
Porous aluminum oxide due to its unique properties has a wide range of applications in technology. The quality of porous layer, its thickness as well as the size and density of pores, have crucial rule in the performance of this advanced material. Direct and nondestructive measurement of specifications of the porous layer is among the challenges facing the researchers in controlling its fabrication process and improvement of its performance. In this research work, we have tried to employ the capabilities of ion beam analysis techniques to determine certain characteristics of the porous aluminum oxide layer. For this purpose, the techniques of elastic backscattering spectroscopy (EBS), elastic recoil detection (ERD) analysis, and nuclear reaction analysis (NRA) have been employed for characterization of porous alumina and its comparison with nonporous alumina. Using the EBS technique, elemental composition, impurities and depth profiles of elements in the sample are measured. By the NRA technique, oxygen and carbon concentrations in the sample are determined; and by using the ERD technique, the depth profile of the existing hydrogen in the sample is measured. Moreover, by employing the resonant ion beam scattering analysis of 16O(α ,α)16O, structural analysis of the porosity is investigated.
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