عنوان مقاله [English]
This paper presents the design and construction of an apparatus in an RF ion source for automatic impedance matching between variable impedance environment (plasma) and fixed impedance system (an RF power generator) in order to transfer a maximum power to the plasma. The apparatus includes a matching box, a directional coupler and a balanced antenna associated with a transmission line transformer (TLT). The constructed automatic matching system is very simple and at the same time is capable of functioning under different conditions of the gas pressure to ensure a good performance. The matching network is mainly designed in order to be used in the first electrostatic accelerator designed and constructed in NSTIR, where the RF ion source is placed in the HV terminal, where there is no access to a manual matching box during the operation. The measured output current of the ion source is about 700µA with 200W RF power input in the working frequency of 70MHz. The output current of the previous ion source current could not exceed 200µA under the same condition (10-2 Torr) without employing the present matching system. The system is capable of reaching an optimum VSWR point of about 1.2 in the pressure range of 10-1 to 10-4 Torr. This can be realized in a short matching convergence time (i.e., couple of seconds).