عنوان مقاله [English]
نویسندگان [English]چکیده [English]
In this research work, samples of stainless steel 52100 disks were implanted with nitrogen and carbon dioxide ions at the energy of 90 keV. Microhardness measurements were performed to determine the hardness of the surfaces. The N2+ implanted steels at the doses of 1 × 1018 ions cm-2 gave the highest hardness of 49.70%, while for the CO2+ ions implantation, the hardness of 17% and 5% were obtained at the doses of 3 × 1018 and 1 × 1019 ions cm-2, respectively. To support the interpretation of our microhardness results the implanted surfaces were analyzed by the use of XRD method. Our results indicated that the hardness of the N2+ implanted samples are due to formation of beta-CrN phase in the surface layer, while in the CO2+ implanted samples no observation of carbon as graphite or carbide was made. In addition, the absence of any hump in the XRD spectrum indicating that carbon is not in the amorphous phase either.
ion implantation, nitrogen ion, carbon dioxide ion, hardness, dose and energy